Condenser plate tile
AssigneeKateeva, Inc.
InventorGregory Lewis
Life of this patent
Estimating the term…
Abstract
Thermal treatment tiles and plates are described herein. The thermal treatment tiles described herein include a control surface; an active surface opposite the control surface; a plurality of enclosed channels formed within the control surface, each channel having walls contiguous with the control surface, and each channel having an inlet terminus and an outlet terminus for flowing a thermal control fluid within the channel in direct contact with the walls of the channel; and complimentary edge joints along the edges of the thermal treatment tile. The thermal treatment plates described herein are assembled using the thermal treatment tiles by attaching a plurality of the thermal treatment tiles at the edge joints thereof.
Claims20
A thermal treatment tile, comprising:
- a control surface;
- an active surface opposite the control surface;
- a plurality of enclosed channels formed within the control surface, each channel having walls contiguous with the control surface, and each channel having an inlet terminus and an outlet terminus for flowing a thermal control fluid within the channel in direct contact with the walls of the channel;
- and
- complimentary edge joints along the edges of the thermal treatment tile.
A thermal treatment plate, comprising:
- a plurality of tiles, each tile comprising:
- a control surface;
- an active surface opposite the control surface;
- a plurality of enclosed channels formed within the control surface, each channel having walls contiguous with the control surface, and each channel having an inlet terminus and an outlet terminus for flowing a thermal control fluid within the channel in direct contact with the walls of the channel;
- and
- complimentary edge joints along the edges of the thermal treatment tile,
- wherein each tile of the plate is attached to another tile of the plate at one of the edge joints.
A processing chamber, comprising:
- an enclosure;
- a substrate support within the enclosure;
- and
- a thermal treatment plate facing the substrate support, the thermal treatment plate comprising:
- a plurality of tiles, each tile comprising:
- a control surface;
- an active surface opposite the control surface;
- a plurality of enclosed channels formed within the control surface, each channel having walls contiguous with the control surface, and each channel having an inlet terminus and an outlet terminus for flowing a thermal control fluid within the channel in direct contact with the walls of the channel;
- and
- complimentary edge joints along the edges of the thermal treatment tile,
- wherein each tile of the plate is attached to another tile of the plate at one of the edge joints.
Dependencies are inferred from the claim text.