Vessels and methods for storing and delivery a reagent
AssigneeEntegris, Inc.
InventorsOleg Byl, Douglas Edwards, Jessica Verbisky
Life of this patent
Estimating the term…
Abstract
A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.
Claims14
A storage vessel, comprising:
- a vessel body comprising a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior comprising a volume;
- a reagent material stored within the interior of the vessel body, the reagent material being in both a gas phase and a liquid phase;
- and
- an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume such that, regardless of orientation of the storage vessel, the second end remains above a level of the liquid phase of the reagent material,
- wherein the reagent material has a vapor pressure of less than 200 Torr at 20-25 degrees Celsius.
A storage vessel, comprising:
- a vessel body comprising a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior comprising a volume;
- a reagent material stored within the interior of the vessel body, the reagent material being in both a gas phase and a liquid phase;
- an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume such that, regardless of orientation of the storage vessel, the second end remains above a level of the liquid phase of the reagent material;
- and
- one or more heat transfer or thermal control features configured to promote evaporation of the liquid phase of the reagent material and maintain a desired vapor pressure within the vessel.
Dependencies are inferred from the claim text.