Vibration attenuation control method and apparatus for electroplating equipment, and electronic equipment

A vibration attenuation control apparatus of an electroplating equipment, comprising:

• an information acquisition unit, used for acquiring the resonance frequency of the electroplating equipment, and sending the resonance frequency of the electroplating equipment to a processing unit;
• a processing unit, used for receiving the resonance frequency of the electroplating equipment sent by the information acquisition unit, selecting the working frequency of paddles based on the resonance frequency of the electroplating equipment, including determining that the working frequency of the paddles being equal to m times of the resonance frequency, m being a real number within the numerical range (0, 0.5], and the working cycle corresponding to the working frequency of the paddles being less than the process time of the electroplating;
• wherein, the working frequency of the paddles is the frequency at which the paddles perform the periodic movement in manner of the stepwise reciprocating stepping in an electroplating chamber of the electroplating equipment;
• a controlling unit, used for controlling the work of the paddles according to the working frequency of the paddles selected by the processing unit.

An electroplating equipment, comprising a vibration attenuation control apparatus comprising:

• an information acquisition unit, used for acquiring the resonance frequency of the electroplating equipment, and sending the resonance frequency of the electroplating equipment to a processing unit;
• a processing unit, used for receiving the resonance frequency of the electroplating equipment sent by the information acquisition unit, selecting the working frequency of paddles based on the resonance frequency of the electroplating equipment, including determining that the working frequency of the paddles being equal to m times of the resonance frequency, m being a real number within the numerical range (0, 0.5], and the working cycle corresponding to the working frequency of the paddles being less than the process time of the electroplating;
• wherein, the working frequency of the paddles is the frequency at which the paddles perform the periodic movement in manner of the stepwise reciprocating stepping in an electroplating chamber of the electroplating equipment;
• a controlling unit, used for controlling the work of the paddles according to the working frequency of the paddles selected by the processing unit.