Distribution system for the simultaneous chemical and/or electrolytic surface treatment of at least two substrates

Abstract

The disclosure relates to a distribution system for an electrolyte and an electric current for chemical and/or electrolytic surface treatment of simultaneously at least two substrate surfaces of at least two different substrates, comprising a substrate holder unit, an immersion tank, at least two distribution bodies, and a control unit, wherein the substrate holder unit comprises two substrate holders, each configured to hold one of the at least two substrates in the immersion tank, wherein the immersion tank is configured to hold a shared electrolyte for the substrates, wherein the two substrate holders are further configured to electrically contact the two substrate surfaces, wherein each distribution body is arranged to be designated to one of the two substrate surfaces, wherein each distribution body comprises jet holes to direct a flow of the electrolyte onto the designated substrate surface and drain holes to direct a flow of the electric current relative to the designated substrate surface, and wherein the control unit is configured to control for each distribution body and/or for each substrate surface individually the flow of the electrolyte and the flow of the electric current. Further, the disclosure relates to a distribution method for an electrolyte and an electric current for chemical and/or electrolytic surface treatment of simultaneously at least two substrate surfaces of at least two different substrates.

Dependencies are inferred from the claim text.