Deposition apparatus for superconductor

Abstract

The present invention relates to a deposition apparatus for a superconductor, the apparatus comprising: a withdrawal unit around which a wire rod unit is wound; a plurality of chambers through which the wire rod unit withdrawn from the withdrawal unit passes and which are spaced apart from one another so as to perform individual deposition processes; and a retraction unit which retracts the wire rod unit having passed through the chambers, wherein the wire rod unit is withdrawn from the withdrawal unit and then undergoes deposition while sequentially passing through the plurality of chambers, disposed between the withdrawal unit and the retraction unit, before retracting into the retraction unit. The wire rod unit is wound around each chamber unit one or more times such that the deposition time for the wire rod unit, in the limited inner spaces of the chamber units, is extended and thus the size of the entire facility can be reduced.

Dependencies are inferred from the claim text.