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US 2026/0201281 A1Published application
Substrate treatment solution
AssigneeMerck Patent GmbH
InventorsYuki Kubo, Tatsuro Nagahara
Life of this patent
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Abstract
A substrate treatment solution including a solidification component, wherein at least either the following condition (i) or condition (ii) is satisfied: (i) the solidification component is a plastic crystal compound having a melting point of 20° C. or more and 200° C. or less, and (ii) the substrate treatment solution further includes a surface modification component.
Claims9
A substrate treatment solution comprising a solidification component, wherein at least either the following condition (i) or condition (ii) is satisfied:
- (i) the solidification component is a plastic crystal compound having a melting point of 20° C. or more and 200° C. or less, and
- (ii) the substrate treatment solution further comprises a surface modification component represented by the following general formula (I),
- wherein X is each independently one of the group consisting of a tertiary amine, a secondary amine, a primary amine, —OH, —SO2—NH—SO2—, —CO—NH2, —COOH, —CHO, —SO3H, —CO—NH—CO—, and —CO—NH—SO2—,
- wherein Y is each independently H, fluoroalkyl having C1-10, or fluoroaryl having C5-20, and at least one of Y is fluoroalkyl having C1-10 or fluoroaryl having C5-20,
- wherein n11 is 1, 2 or 3,
- wherein m11 is 1, 2 or 3, and
- wherein at least one of n11 and m11 is 1.
4 more elements
Dependencies are inferred from the claim text.