Rubber composition for seal material

Abstract

The present invention relates to: a rubber composition for a seal material containing a crosslinkable rubber component and a donor-acceptor type molecular compound; a seal material containing a crosslinked product of the rubber composition for a seal material; and an O ring, a member for a semiconductor manufacturing apparatus, and a seal material for a semiconductor manufacturing apparatus, each of which contains the seal material. The present invention can provide a rubber composition for a seal material that is for use in forming a seal material usable in a semiconductor manufacturing apparatus using plasma, and exhibits excellent antistatic properties.

Dependencies are inferred from the claim text.