Dicationic polymer and copolymer and their use for chemical mechanical planarization

A chemical mechanical planarization composition comprising:

• an abrasive selected from the group consisting of inorganic oxide particles, metal oxide-coated inorganic oxide particles, organic polymer particles, metal oxide-coated organic polymer particles, and combinations thereof;
• an activator;
• an oxidizing agent;
• an additive comprising the dicationic polymer or copolymer formed by at least one dicationic monomer comprising a structure of (I):
• wherein:
• P1 denotes a polymerizable group selected from groups containing C═C double bonds;
• Sp1 and Sp2 denote independently at each occurrence a spacer group or a single bond;
• R1, R2, and R3 are each independently H, or substituted or unsubstituted aliphatic aromatic moiety selected from the group consisting of (1) alkyl having <12 C atoms, or <4 C atoms atoms;
• and (2) phenyl, pyridinyl, pyrimidyl, furanyl or nitrogen-containing five-membered ring;
• and (3) combinations of (1) and (2);
• Cat denotes in each occurrence a cationic group selected from the group consisting of ammonium-, guanidinium-, triazolium-, phosphonium-, pyridinium- and triazolium-type group;
• X− denotes an anionic counterion selected from the group consisting of halide selected from the group consisting of F—, Cl—, Br—, and I—;
• BF4—;
• PF6—;
• carboxylate;
• malonate;
• citrate;
• carbonate;
• fumarate;
• MeOSO3—;
• MeSO3—;
• CF3COO—;
• CF3SO3—;
• nitrate;
• and sulfate;
• and
• the dicationic polymer or copolymer is formed by a polymerization method selected from the group consisting of free radical polymerization, reversible addition-fragmentation chain-transfer polymerization (RAFT), nitroxide-mediated polymerization (NMP), atomic transfer reaction polymerization (ATRP), ring opening polymerization (ROMP) and polycondensation reaction;
• water;
• and optionally at least one
• a corrosion inhibitor;
• a dishing reducing agent;
• a stabilizer;
• a pH adjusting agent.