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US 2026/0200802 A1Published application
Methods of forming a temperature-stable, low-dielectric constant material with an ultra-low loss tangent
AssigneeSkyworks Solutions, Inc.
InventorsMichael David Hill, Srinivas Polisetty
Life of this patent
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Abstract
Disclosed herein are embodiments of high Q, temperature stable materials with low dielectric constants. In particular, a two-phase material can form based on the rutile phase of titanium oxide along with a spinel structure of ZnAl2O4. This material can have a dielectric constant below 15 which is simultaneously temperature stable.
Claims21
(canceled)
A temperature-stable, low-dielectric constant material formed out of a ZnO-A12O3—TiO2 ternary system, the material comprising:
- a first phase formed out of the ternary system, the first phase being at least one spinel;
- and
- a second phase thermodynamically compatible with the first phase and formed out of the ternary system, the second phase being rutile, the material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the ternary system including about 0.3 to about 0.4 mole fraction ZnO.
A temperature-stable, low-dielectric constant material formed out of a ZnO—Al2O3—TiO2 ternary system, the material comprising:
- a first phase formed out of the ternary system, the first phase being at least one spinel;
- and
- a second phase thermodynamically compatible with the first phase and formed out of the ternary system, the second phase being rutile, the material having a dielectric constant of between 8 and 15 and a loss tangent of less than 0.0001, the ternary system including about 0.01 to about 0.5 mole fraction TiO2.
Dependencies are inferred from the claim text.