Method for producing a nano-or micro-sheet element with the help of a patterned support layer

Abstract

A method for producing a nano- or micro-sheet element is provided, the nano- or micro-sheet element particularly being made of graphene and/or other sheet-materials. The method is based on a laminate (14) comprising a growth substrate (1), a nano- or micro-sheet layer (2) and a support layer (3). The nano- or micro-sheet layer (2) is adapted to form the nano- or micro-sheet element. The method comprises at least the step of electrochemical delamination of the laminate (14) by means of electrolysis in such a way, that the growth substrate (1) is separated from the nano- or micro-sheet layer (2) and the support layer (3). The step of electrochemical delamination of the laminate (14) is carried out with the support layer (3) having a pattern (31) with a plurality of local depressions (311) and/or elevations (312).

Dependencies are inferred from the claim text.