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US 2026/0200732 A1Published application
Gas generation device
AssigneeEbara Corporation
InventorsSuguru OZAWA, Yuji ARAKI, Yoichi NAKAGAWA, Risa KIMURA
Life of this patent
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Abstract
A plurality of trench grooves (8) are formed on a first electrode (6) of a gas generation device (1), and a discharge space (12) formed between a first electrode surface (7) and a second electrode surface (11) is connected to a gas introducing space (17) for introducing material gas through a material gas supply inlet (4). A ratio P/D of a pitch P of the trench grooves (8) to a diameter D of the first electrode (6) is set at 0.0020 to 0.0150, and a ratio VT/VG of a volume VT of a trench space formed by the trench grooves (8) to a volume VG of the gas introducing space (17) is set at 0.016 to 0.203.
Claims7
A gas generation device comprising:
- a first electrode having a first electrode surface;
- a second electrode arranged on an outer side of the first electrode and having a second electrode surface opposed to the first electrode surface;
- a discharge space formed between the first electrode surface and the second electrode surface;
- a material gas supply inlet for supplying the discharge space with material gas;
- and
- a generated gas delivery outlet for delivering, to outside the device, generated gas generated from the material gas due to discharge produced in the discharge space when a voltage is applied across the first electrode surface and the second electrode surface, wherein
- a plurality of trench grooves are formed on the first electrode,
- the discharge space is connected to a gas introducing space for introducing the material gas through the material gas supply inlet,
- a ratio P/D of a pitch P of the trench grooves to a diameter D of the first electrode is set at 0.0020 to 0.0150, and
- a ratio VT/VG of a volume VT of the trench space formed by the trench grooves to a volume VG of the gas introducing space is set at 0.016 to 0.203.
7 more elements
A gas generation device comprising:
- a first electrode having a first electrode surface;
- a second electrode arranged on an outer side of the first electrode and having a second electrode surface opposed to the first electrode surface;
- a discharge space formed between the first electrode surface and the second electrode surface;
- a material gas supply inlet for supplying the discharge space with material gas;
- a generated gas delivery outlet for delivering, to outside the device, generated gas generated from the material gas due to discharge produced in the discharge space when a voltage is applied across the first electrode surface and the second electrode surface;
- and
- a base member arranged on an outer side of the second electrode, wherein
- a cooling flow channel through which a cooling medium is caused to flow is formed in the base member,
- the cooling flow channel includes an entrance part through which the cooling medium flows into the base member, an exit part through which the cooling medium flows out of the base member, and a cooling part provided between the entrance part and the exit part,
- a ratio d1/d2 of a flow channel diameter d1 of the entrance part to a flow channel diameter d2 of the cooling part is set at 0.25 to 1.0 as seen in cross section of the flow channel, and
- a ratio d2/d3 of the flow channel diameter d2 of the cooling part to a flow channel diameter d3 of the exit part is set at 1.0 to 4.0 as seen in cross section of the flow channel.
8 more elements
A gas generation device comprising:
- a first electrode having a first electrode surface;
- a second electrode arranged on an outer side of the first electrode and having a second electrode surface opposed to the first electrode surface;
- a discharge space formed between the first electrode surface and the second electrode surface;
- a material gas supply inlet for supplying the discharge space with material gas;
- a generated gas delivery outlet for delivering, to outside the device, generated gas generated from the material gas due to discharge produced in the discharge space when a voltage is applied across the first electrode surface and the second electrode surface;
- and
- a base member arranged on an outer side of the second electrode, wherein
- a cooling flow channel through which a cooling medium is caused to flow is formed in the base member,
- the cooling flow channel includes an entrance part through which the cooling medium flows into the base member, an exit part through which the cooling medium flows out of the base member, and a cooling part provided between the entrance part and the exit part, and
- a ratio S1/S2 of an area S1 of the cooling part of the cooling flow channel to an area S2 of the first electrode is set at 0.45 to 0.93 as seen in plan view.
7 more elements
Dependencies are inferred from the claim text.