Microsensor with a protective mass

Abstract

A microsensor for detecting a measured variable. The microsensor includes: a substrate constructed from a layer structure in a normal direction; at least one sensor element detecting a measured variable; a carrier element that is largely set free from the substrate at least by a lateral clearance region and that includes the sensor element; wherein, in the normal direction above the sensor element and at least in the lateral clearance region, a gel-like protective mass is introduced, which is expandable into a further lower clearance region that is in each case unfilled by the protective mass and is arranged below the carrier element in the normal direction and/or into a further lateral clearance region that is introduced laterally offset relative to the lateral clearance region.

Dependencies are inferred from the claim text.