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US 2026/0200723 A1Published application
Semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJHENG-HONG JIANG, SHING-HUANG WU, CHIA-WEI LIU
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Abstract
A semiconductor structure includes a substrate, a fixed structure disposed over the substrate, a floating structure coupled to the fixed structure and separated from the substrate, and a capping layer disposed over a surface of the floating structure. The second portion of the floating structure and the fixed structure include a same material.
Claims20
A semiconductor structure, comprising:
- a substrate;
- a fixed structure disposed over the substrate;
- a floating structure coupled to the fixed structure and separated from the substrate, wherein the floating structure comprises:
- a first portion coupled to the fixed structure;
- and
- a second portion coupled to the first portion and separated from the fixed structure by the first portion;
- and
- a capping layer disposed over a surface of the floating structure,
- wherein the second portion of the floating structure and the fixed structure comprise a same material.
6 more elements
A semiconductor structure, comprising:
- a substrate;
- a pair of fixed members disposed over the substrate;
- and
- a floating member disposed between the pair of fixed members, wherein the floating member comprises:
- a first conductive layer coupled to the pair of fixed members and separated from the substrate;
- a second conductive layer coupled to the pair of fixed members and over the first conductive layer;
- and
- a capping layer disposed between the first conductive layer and the second conductive layer.
5 more elements
A semiconductor structure, comprising:
- a substrate;
- a fixed structure disposed over the substrate;
- a floating structure coupled to the fixed structure and separated from the substrate, wherein the floating structure has a first side facing the substrate and a second side opposite to the first side;
- a first protrusion and a second protrusion disposed over the floating structure on the second side and separated from each other;
- a first buffering structure covering a top surface and sidewalls of the first protrusion;
- and
- a second buffering structure covering a top surface and sidewalls of the second protrusion, wherein the first buffering structure and the second buffering structure comprise different materials.
4 more elements
Dependencies are inferred from the claim text.