Method and apparatus for transferring one or more layers of a material from an initial substrate to a target substrate

An apparatus for transferring one or more layers of a material from an initial substrate to a target substrate, wherein the apparatus comprises

• a container for holding an electrolyte solution and for at least partially submerging the initial substrate with the one or more layers of the material and the target substrate in the electrolyte solution,
• a substrate holding member arranged inside the container, wherein the substrate holding member is configured for retaining the initial substrate or the target substrate,
• a voltage source connectable to the one or more layers of the material and/or to the initial substrate,
• an actuator configured for applying a separation force to the target substrate in a direction away from the initial substrate or to the initial substrate in a direction away from the target substrate, and
• a controller for controlling the actuator for:
• moving an edge of the target substrate away from the initial substrate or moving an edge of the initial substrate away from the target substrate, for providing a separation space between the initial substrate and the one or more layers of the material, wherein a separation front is provided where the initial substrate and the one or more layers of the material commence separation from each other;
• and
• increasing the separation space and moving the separation front along the initial substrate, wherein the initial substrate with the one or more layers of the material and the target substrate are at least partially submerged in the electrolyte solution and a potential is applied to a surface of the initial substrate that is facing the one or more layers of the material and/or to the one or more layers of the material, wherein the electrolyte diffuses between the initial substrate and the one or more layers of material, wherein the actuator is controlled to provide a progress of the separation front that is equal to or smaller than a diffusion velocity of the electrolyte.