Monitoring device and electron beam irradiation sterilization device
AssigneeShanghai United Imaging Microelectronics Technology Co., Ltd.
InventorWei LIU
Life of this patent
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Abstract
A monitoring device and an electron beam irradiation sterilization device are provided. The monitoring device includes: a main shell provided with a first accommodating chamber, a sensing member located in the first accommodating chamber, and a sealing cover. The sensing member includes a sensor body and a probe connected to the sensor body, and is capable of moving relative to the main shell. The sealing cover includes a cover body and a groove arranged on the cover body, the cover body is connected to the main shell and abuts against the sensor body, the groove is defined as a sealing chamber accommodating the probe, and the sealing cover forms a radiation shield on the sensor body and expose the probe to electron irradiation.
Claims20
A monitoring device, comprising a main shell, a sensing member, and a sealing cover,
- wherein the main shell is provided with a first accommodating chamber;
- the sensing member is located in the first accommodating chamber, the sensing member comprises a sensor body and a probe connected to the sensor body, and the sensing member is capable of moving relative to the main shell;
- and
- the sealing cover comprises a cover body and a groove arranged on the cover body, the groove has an opening towards the sensing member, the cover body is connected to the main shell and abuts against the sensor body, the groove is enclosed for the sensing member to define a sealing chamber accommodating the probe, and the sealing cover is configured to form a radiation shield on the sensor body and expose the probe to electron irradiation.
Dependencies are inferred from the claim text.