Annealing apparatus and method for operating the annealing apparatus
AssigneeNational Tsing Hua University
InventorsPo-Wen CHIU, Jui-Kang YEN
Life of this patent
Estimating the term…
Abstract
An annealing apparatus includes a chamber, a base disposed in the chamber for supporting a substrate, a heating set that includes at least a first subset and a second subset each subset configured to correspond to different parts of the substrate, and a power supply and control module that activates the first subset thereby switching the first subset to an activated state and heat the corresponding parts of the substrate, deactivates the first subset, activates the second subset thereby switching the second subset to the activated state and heat the corresponding parts, and deactivates the second subset.
Claims23
An annealing apparatus comprising:
- a chamber;
- a base disposed in the chamber for supporting a substrate;
- a heating set disposed in the chamber above the base, the heating subset including at least a first subset and a second subset, each subset configured to correspond to different parts of the substrate disposed on the base;
- and
- a power supply and control module connected to the heating set and configured to control its operations,
- wherein the power supply and control module is configured to:
- activate the first subset of the heating set, thereby switching the first subset to an activated state to heat the corresponding parts of the substrate,
- deactivate the first subset of the heating set, thereby switching the first subset to a standby state to stop heating the corresponding parts of the substrate,
- activate the second subset of the heating set, thereby switching the second subset to an activated state to heat the corresponding parts of the substrate, and
- deactivate the second subset of the heating set, thereby switching the second subset to a standby state to stop heating the corresponding parts of the substrate;
- wherein:
- activating and deactivating of the first subset are controlled by providing a pulse signal to the first subset;
- activating and deactivating of the second subset are controlled by providing another pulse signal to the second subset.
A method for operating an annealing apparatus, the annealing apparatus comprising a chamber, a base disposed in the chamber for supporting a substrate, a heating set disposed in the chamber and above the base and including at least a first subset and a second subset, each subset corresponding to different parts of the substrate disposed on the base, and a power supply and control module connected to the heating set to control its operation, the method being implemented by the power supply and control module and comprising:
- activating the first subset of the heating set to switch the first subset to switch to an activated state and heat the parts of the substrate corresponding to the first subset;
- deactivating the first subset of the heating set to switch the first subset to a standby state and stop heating the parts of the substrate corresponding to the first subset;
- activating the second subset of the heating set to switch the second subset to an activated state and heat the parts of the substrate corresponding to the second subset;
- and
- deactivating the second subset of the heating set to switch the second subset to a standby state and stop heating the parts of the substrate that corresponding to the second subset;
- wherein:
- the consecutive operations of activating and deactivating the first subset are performed by providing a pulse signal to the first subset;
- the consecutive operations of activating and deactivating the second subset are performed by providing another pulse signal to the second subset.
Dependencies are inferred from the claim text.