Apparatuses for cleaning a multi-station semiconductor processing chamber
AssigneeLam Research Corporation
InventorsHarish Kumar Premakumar, Tongtong Guo, Rachel E. Batzer, Bo Gong, Francisco J. Juarez, Ching-Yun Chang
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Abstract
Disclosed are various systems that allow for plasma delivery from a central location in a multi-station processing chamber to be redirected to different processing stations within the chamber. Such systems may include a deflector plate that is mounted to a wafer indexer such that the deflector plate is centered on the wafer indexer. In other implementations, such systems may include a deflector plate that is mounted in a fixed relationship with a ceiling of the processing chamber.
Claims20
A deflector plate for use in a semiconductor processing tool, the deflector plate comprising:
- a body having a top surface and an underside surface that are on opposite sides of the body;
- and
- a plurality of recesses in the top surface and arranged in a radial pattern around a center axis, wherein:
- each recess is at least partially defined by a corresponding bottom surface, a corresponding first side surface, a corresponding second side surface, and a corresponding front surface, and
- the first side surface, the second side surface, and the front surface intersect the bottom surface of that recess.
A deflector plate for use in a semiconductor processing tool, the deflector plate comprising:
- a body having a top surface and an underside surface that are on opposite sides of the body;
- and
- a plurality of recesses in the top surface and arranged in a radial pattern around a center axis, wherein:
- each recess is at least partially defined by a corresponding bottom surface that is continuous, a corresponding first side surface, a corresponding second side surface, and a corresponding front surface, and
- the first side surface, the second side surface, and the front surface intersect the bottom surface of that recess.
A deflector plate for use in a semiconductor processing tool, the deflector plate comprising:
- a body having a top surface and an underside surface that are on opposite sides of the body;
- and
- a plurality of recesses in the top surface and arranged in a radial pattern around a center axis, wherein:
- each recess is at least partially defined by a corresponding bottom surface, a corresponding first side surface, a corresponding second side surface, and a corresponding front surface that extends away from the bottom surface at an angle.
Dependencies are inferred from the claim text.