A droplet stream alignment mechanism and method thereof
AssigneeASML Netherlands B.V.
InventorsWyatt DUVALL, Guy du Motay VEBER, Ethan Marcus SWERDLOW
Life of this patent
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Abstract
A system (600) includes first (604) and second (606) portions of an alignment mechanism. The first portion is coupled to a nozzle (602) within a droplet generation device. The second portion is coupled to an outside surface (608) of the droplet generation device. The second portion comprises a second adjustment mechanism (612) to adjust a first adjustment mechanism (610) of the first portion in order to align the nozzle such that droplets travel from the nozzle substantially along a droplet path (614).
Claims19
1-29. (canceled)
A system comprising:
- a first portion of an alignment mechanism coupled to a nozzle and disposed within a droplet generation device, the first portion comprising a first adjustment mechanism;
- and
- a second portion of the alignment mechanism coupled to an outside surface of the droplet generation device, the second portion comprising a second adjustment mechanism,
- wherein the second adjustment mechanism is configured to adjust the first adjustment mechanism to adjust a position of the nozzle and align a path of a droplet stream with respect to a target region.
A method comprising:
- generating droplets from a nozzle of a droplet generation device, the nozzle coupled to a first portion of an alignment mechanism;
- transmitting the droplets toward a target region along a droplet stream;
- determining a position of the droplet stream with respect to the target region;
- and
- adjusting, based on the determining, a position of the nozzle through an interaction of the first portion of the alignment mechanism and a second portion of the alignment mechanism, the second portion coupled to an outer surface of the droplet generation device.
A system, comprising:
- a first portion of an alignment mechanism coupled to a nozzle and disposed within a droplet generation device, the first portion comprising a first adjustment mechanism;
- a second portion of the alignment mechanism coupled to an outside surface of the droplet generation device, the second portion comprising a second adjustment mechanism
- wherein the second adjustment mechanism is configured to adjust the first adjustment mechanism in order to adjust a position of the nozzle and align a path of a droplet stream with respect to a target region,
- wherein the first adjustment mechanism comprises:
- a cradle configured to hold the nozzle,
- at least one clamp configured to affix the nozzle to the cradle,
- a spherical bearing, comprising:
- a spherical structure rigidly coupled to the cradle and supported in a groove, and
- a leaf spring configured to bias the spherical structure toward the groove, and
- wherein the second adjustment mechanism comprises:
- a base rigidly coupled to the nozzle;
- a mounting plate coupled to a frame of the system and disposed on the base;
- a pad rigidly coupled to the mounting plate;
- and
- an intermediate structure rigidly coupled to the base and configured to be coupled to the pad;
- wherein the base is movable with respect to the mounting plate,
- wherein the intermediate structure is further configured to move the base with respect to the mounting plate,
- wherein the base is configured to rotate the spherical structure based on adjusting the intermediate structure, and
- wherein the adjusting of the intermediate structure results in a proportional adjustment of the first portion.
Dependencies are inferred from the claim text.