Integrated ceramic waveguide optical amplifiers and laser devices
OwnerYoung-Kai Chen, Anna Tatarczakinventors
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Abstract
Optical amplifiers, laser devices, and methods of forming such devices are disclosed. One such method includes forming a lower cladding layer on a substrate and forming a doped ceramic layer on the lower cladding layer. The forming of the doped ceramic layer uses a plasma-assisted process that deposits and co-dopes a ceramic material with rare-earth dopants. The method also includes forming an upper cladding layer on the doped ceramic layer, and etching the upper cladding layer and the doped ceramic layer to form a doped ceramic waveguide.
Claims20
An optical device, comprising:
- a multiplexer comprising a pump light input to receive a pump light, a wavelength division multiplexing (WDM) optical signal input to receive a WDM optical signal, and a combined optical signal output to which the multiplexer provides a combined optical signal comprising the pump light received via the pump light input and the WDM optical signal received via the WDM optical signal input;
- and
- a ceramic waveguide comprising a waveguide input coupled to the combined optical signal output of the multiplexer to receive the combined optical signal provided by the multiplexer;
- and
- wherein the ceramic waveguide comprises rare-earth dopants that impart the WDM optical signal of the combined optical signal with optical gain as the pump light and the WDM optical signal of the combined optical signal propagate along the ceramic waveguide.
A method of forming an optical device, the method comprising:
- forming a lower cladding layer on a substrate;
- forming a doped ceramic layer on the lower cladding layer using a plasma-assisted process that deposits and co-dopes a ceramic material with rare-earth dopants;
- forming a first upper cladding layer on the doped ceramic layer;
- and
- removing portions of the first upper cladding layer and the doped ceramic layer to form a doped ceramic waveguide.
Dependencies are inferred from the claim text.