Adjustment of power and frequency based on three or more states

A plasma system comprising:

• a first radio frequency (RF) generator, the first RF generator including a first controller and a primary RF power supply, the first controller configured to:
• control, based on a pulsed signal, the primary RF power supply to generate a primary RF signal having a first primary quantitative level;
• control the primary RF power supply to transition the first primary quantitative level to a second primary quantitative level of the primary RF signal;
• and
• control the primary RF power supply to transition the second primary quantitative level to a third primary quantitative level of the primary RF signal, each of the first, second, and third primary quantitative level is greater than zero;
• and
• a second RF generator, the second RF generator including a second controller and a secondary RF power supply, the second controller is configured to:
• control the secondary RF power supply to generate a secondary RF signal having a first secondary quantitative level;
• and
• control the secondary RF power supply to transition the first secondary quantitative level to a second secondary quantitative level of the secondary RF signal.

A method comprising:

• controlling, by a first controller, a primary radio frequency (RF) power supply to generate a primary RF signal having a first primary quantitative level, said controlling the primary RF power supply is based on a pulsed signal;
• controlling the primary RF power supply to transition the first primary quantitative level to a second primary quantitative level of the primary RF signal;
• controlling the primary RF power supply to transition the second primary quantitative level to a third primary quantitative level of the primary RF signal, each of the first, second, and third primary quantitative level is greater than zero;
• controlling, by a second controller, a secondary RF power supply to generate a secondary RF signal having a first secondary quantitative level;
• and
• controlling the secondary RF power supply to transition the first secondary quantitative level to a second secondary quantitative level of the secondary RF signal.