Method for measuring melt gap
AssigneeSK Siltron Co., Ltd.
InventorsJe Gyu OH, Do Hyun PARK, Han Sol JUNG, Jong Min KANG
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AssigneeSK Siltron Co., Ltd.
InventorsJe Gyu OH, Do Hyun PARK, Han Sol JUNG, Jong Min KANG
Estimating the term…
The embodiment relates to a method for measuring a melt gap capable of improving the measurement accuracy of the melt gap using a reflection image of a scale load. According to an aspect of the embodiment, a method for measuring a melt gap for single crystal growth is provided, and the method includes a first step of acquiring an image including a scale rod and reflection image thereof in a silicon melt during single crystal ingot growth; a second step of correcting the shape of the reflection image acquired in the first step to a regular ellipse if the shape of the reflection image is an irregular ellipse; and a third step of calculating the distance between the corrected reflection image in the second step and the scale rod as the melt gap.
A method for measuring a melt gap for single crystal growth, comprising:
Dependencies are inferred from the claim text.