Facility abnormality determination device, abnormality determination system, abnormality determination method, control method for abnormality determination system, and abnormality determination program

An anomaly determination method of a facility in which sequence control is performed to issue a plurality of events in order, the method comprising:

• a step of acquiring an event interval with respect to a first event and a second event included in the plurality of events;
• a step of acquiring at least one piece of process data of the facility;
• a step of calculating an evaluation index of a degree of similarity to normal data with respect to analysis target data including the event interval and the process data;
• and
• a step of determining presence or absence of anomaly of the facility by comparing the evaluation index with a threshold value set in advance.

An anomaly determination program of a facility in which a plurality of events are issued in order, the program causing a computer to execute:

• a step of acquiring an event interval with respect to a first event and a second event included in the plurality of events;
• a step of acquiring at least one piece of process data of the facility;
• a step of calculating an evaluation index of a degree of similarity to normal data with respect to analysis target data including the event interval and the process data;
• and
• a step of determining presence or absence of anomaly of the facility by comparing the evaluation index with a threshold value set in advance.

An anomaly determination system of a facility, which includes an anomaly determination device of the facility in which a plurality of events are issued in order and an information processing device, the system comprising:

• an event interval acquisition unit that acquires an event interval with respect to a first event and a second event included in the plurality of events according to a request from the information processing device;
• a process data acquisition unit that acquires at least one piece of process data of the facility;
• an evaluation index calculation unit that calculates an evaluation index of a degree of similarity to normal data with respect to analysis target data including the event interval and the process data;
• and
• an anomaly determination unit that determines presence or absence of anomaly of the facility by comparing the evaluation index with a threshold value set in advance.

A control method for an anomaly determination system of a facility, which includes an anomaly determination device of the facility in which a plurality of events are issued in order and an information processing device, in the control method,

• the anomaly determination device executes:
• an event interval acquisition step of acquiring an event interval with respect to a first event and a second event included in the plurality of events according to a request from the information processing device;
• a process data acquisition step of acquiring at least one piece of process data of the facility;
• an evaluation index calculation step of calculating an evaluation index of a degree of similarity to normal data with respect to analysis target data including the event interval and the process data;
• and
• an anomaly determination step of determining presence or absence of anomaly of the facility by comparing the evaluation index with a threshold value set in advance.