Method for correcting a property, in particular sensitivity, of a capacitive sensor, reading circuit for a capacitive sensor, and sensor system

Abstract

A method for correcting a sensitivity of a capacitive sensor, in particular accelerometer. The capacitive sensor is configured to generate capacitive sensor signals according to a physical quantity, in particular acceleration, acting on the sensor. In a reading step, a measured value associated with a resting capacitance of the capacitive sensor is read, in particular by means of a reading circuit, and, in a correction step, a correction of the sensitivity of the sensor is performed according to the read measured value of the resting capacitance. A reading circuit for a capacitive sensor and a sensor system configured to perform the method are also described.

Dependencies are inferred from the claim text.