Vapor supply for substrate processing systems

Abstract

A vapor supply system to supply vapor to a process module of a substrate processing tool includes an evaporator assembly to vaporize liquid and to supply the vaporized liquid as vapor to the process module. The evaporator assembly is located external to the substrate processing tool. The vapor supply system includes a gas box to receive the vapor supplied by the evaporator assembly and supply the vapor from the gas box to the process module. The gas box encloses a plurality of valves and respective mass flow controllers to selectively supply the vapor from the evaporator assembly and at least one process gas from a gas source to the process module. The gas box is mounted on or within the substrate processing tool.

Dependencies are inferred from the claim text.