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US 2026/0193497 A1Published application
Adhesive composition and wafer processing tape including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsCHEONIL PARK, MYOUNGCHUL EUM, HWAIL JIN
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Abstract
An adhesive composition includes a resin, a crosslinking agent, and a light absorber. The light absorber includes at least one selected from the group consisting of a benzophenone-based compound, a cyanoacrylate-based compound having a ring structure, a benzotriazole-based compound, and a sterically hindered amine compound having a ring structure.
Claims20
A wafer processing tape, comprising:
- a base film;
- an adhesive composition layer configured to attach to a wafer;
- and
- an adhesive layer between the base film and the adhesive composition layer, wherein the adhesive layer is configured to attach the adhesive composition layer to the base film,
- wherein the adhesive composition layer comprises a resin, a crosslinking agent, and a first light absorber, and
- wherein the first light absorber includes at least one selected from the group consisting of a benzophenone-based compound, a cyanoacrylate-based compound having a ring structure, a benzotriazole-based compound, and a sterically hindered amine-based compound having a ring structure.
3 more elements
A wafer processing method comprising:
- attaching a first surface of a wafer to a carrier;
- attaching a second surface of the wafer, opposite the first surface, to an adhesive composition layer of a wafer processing tape,
- wherein the wafer processing tape comprises the adhesive composition layer and a base film,
- wherein the adhesive composition layer is between the wafer and the base film, wherein the adhesive composition layer comprises a resin, a crosslinking agent, and a first light absorber, and
- wherein the first light absorber includes at least one selected from the group consisting of a benzophenone-based compound, a cyanoacrylate-based compound having a ring structure, a benzotriazole-based compound, and a sterically hindered amine-based compound having a ring structure;
- removing the carrier from the wafer by emitting first ultraviolet light in a direction from the first surface of the wafer toward the second surface of the wafer;
- after removing the carrier, dicing the wafer into individual chips;
- and
- after dicing the wafer, removing the wafer processing tape from the individual chips by emitting second ultraviolet light in a direction from the second surface of the wafer toward the first surface of the wafer.
6 more elements
A wafer processing tape, comprising:
- a base film;
- an adhesive composition layer configured to attach to a wafer;
- and
- an adhesive layer between the base film and the adhesive composition layer, wherein the adhesive layer is configured to attach the adhesive composition layer to the base film,
- wherein the adhesive composition layer comprises an acrylate-based resin, an isocyanate-based crosslinking agent, a first light absorber, and a second light absorber, wherein the first light absorber and the second light absorber include at least one selected from the group consisting of a benzophenone-based compound, a cyanoacrylate-based compound having a ring structure, a benzotriazole-based compound, and a sterically hindered amine-based compound having a ring structure, and the first light absorber and the second light absorber are different from each other.
2 more elements
Dependencies are inferred from the claim text.