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US 2026/0193494 A1Published application
Conductive adhesive film, method of treating adherend, and method of manufacturing semiconductor device
AssigneeResonac Corporation
InventorNaoki EBINA
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Abstract
A conductive adhesive film including an adhesive layer located at an adherend side, and a base material layer, in which a surface resistivity at 140° C. of the conductive adhesive film at a side opposite to an adhesive layer side is from 1×107Ω/□ to 1×1012Ω/□.
Claims12
1:
- A conductive adhesive film, comprising:
- an adhesive layer located at an adherend side;
- and
- a base material layer,
- wherein a surface resistivity at 140° C. of the conductive adhesive film at a side opposite to an adhesive layer side is from 1×107Ω/□ to 1×1012Ω/□.
2 more elements
2:
- The conductive adhesive film according to claim 1, further comprising a conductive layer at a side opposite to a surface of the base material layer at the adhesive layer side.
3:
- The conductive adhesive film according to claim 2, wherein the conductive layer contains a conductive polymer material.
4:
- The conductive adhesive film according to claim 1, wherein a conductive layer is not disposed at a surface of the base material layer at the adhesive layer side.
5:
- The conductive adhesive film according to claim 1, wherein a surface resistivity of the conductive adhesive film at the side opposite to the adhesive layer side is from 2×108Ω/□ to 1×1012Ω/□.
6:
- The conductive adhesive film according to claim 1, wherein an elastic modulus of the base material layer at 23° C. is 3.5 GPa or less.
7:
- The conductive adhesive film according to claim 1, wherein a light transmittance of the conductive adhesive film is 85% or less at least one wavelength included in a wavelength range of from 380 nm to 780 nm.
8:
- The conductive adhesive film according to claim 1, wherein the base material layer contains a polyolefin.
9:
- A method of treating an adherend, comprising:
- bonding an adherend to the adhesive layer of the conductive adhesive film according to claim 1;
- and
- subjecting the adherend to a processing treatment while adsorbing and fixing the adherend to an adsorption stage by electrostatic adsorption.
1 more element
10:
- The method of treating an adherend according to claim 9, wherein the processing treatment is etching, CVD, or PVD.
11:
- The method of treating an adherend according to claim 9, wherein the adherend contains at least one selected from the group consisting of glass, ceramic, quartz, and a compound semiconductor.
12:
- A method of manufacturing a semiconductor device, comprising:
- bonding an adherend to the adhesive layer of the conductive adhesive film according to claim 1;
- and
- subjecting the adherend to a processing treatment while adsorbing and fixing the adherend to an adsorption stage by electrostatic adsorption.
1 more element