High-precision six-degree-of-freedom micropositioner for fine adjustment of oled substrate

A high-precision six-degree-of-freedom micropositioner for fine adjustment of an OLED substrate, the high-precision six-degree-of-freedom micropositioner comprising:

• an inkjet printing device;
• a six-degree-of-freedom motion platform having a placement position for placing a to-be-processed substrate;
• and
• a sealed case, the inkjet printing device and the six-degree-of-freedom motion platform being both located in the sealed case, an inkjet head of the inkjet printing device being configured to eject solution onto the to-be-processed substrate placed at the placement position, and the six-degree-of-freedom motion platform being configured to adjust a relative position between the placement position and the inkjet head,
• wherein the sealed case is provided with a return air inlet and a return air outlet, a return air passage communicating with the return air inlet and the return air outlet is arranged outside the sealed case, a fan unit is arranged inside the sealed case, the fan unit is configured to drive air flow in the sealed case to flow from the return air inlet to the return air outlet, a filter screen and a flow-stabilizing plate are sequentially arranged inside the sealed case along a flow direction of gas in the sealed case, and the six-degree-of-freedom motion platform is located on a side of the flow-stabilizing plate away from the filter screen;
• and
• a gas purifier having an exhaust port communicating with the sealed case.