Showerhead for substrate processing tool
AssigneeLam Research Corporation
InventorsBin LUO, Sean M DONNELLY, Eric MADSEN, Jeffrey WOMACK, Keith Joseph MARTIN
Life of this patent
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Abstract
One example provides a showerhead for a substrate processing tool. The showerhead comprising a faceplate comprising a plurality of outlet holes, a backplate coupled to the faceplate, a plenum between the faceplate and backplate, and a plurality of posts connecting the faceplate and the backplate, an outermost set of posts of the plurality of posts being positioned between 45% and 65% of a distance from a center of the plenum to a perimeter of the plenum and no posts being positioned between 65% and 100% of the distance from the center of the plenum to the perimeter of the plenum.
Claims20
A showerhead for a substrate processing tool, the showerhead comprising:
- a faceplate comprising a plurality of outlet holes;
- a backplate coupled to the faceplate;
- a plenum between the faceplate and backplate;
- and
- a plurality of posts connecting the faceplate and the backplate, an outermost set of posts of the plurality of posts being positioned between 45% and 65% of a distance from a center of the plenum to a perimeter of the plenum and no posts being positioned between 65% and 100% of the distance from the center of the plenum to the perimeter of the plenum.
A showerhead for a substrate processing tool, the showerhead comprising:
- a faceplate comprising a plurality of outlet holes;
- a backplate coupled to the faceplate;
- a plenum between the faceplate and backplate;
- a plurality of posts connecting the faceplate and the backplate;
- and
- a plurality of post access holes formed in the backplate, each post access hole comprising a radiused edge at an opening of the post access hole to an outer surface of the backplate.
A showerhead for a substrate processing tool, the showerhead comprising:
- a faceplate comprising a plurality of outlet holes;
- a backplate coupled to the faceplate;
- a plenum between the faceplate and backplate;
- and
- a plurality of posts connecting the faceplate and the backplate, an outermost set of posts of the plurality of posts being arranged in a circular pattern with at least three posts per each quadrant of the circle pattern, a first post being spaced from a second post of the three posts by a first angular distance along the circular pattern, and the second post being spaced from a third post by a second angular distance along the circular pattern, the first angular distance being shorter than the second angular distance.
Dependencies are inferred from the claim text.