Laser-assisted reflow for selective heating used with a low temperature tray
AssigneeIntel Corporation
InventorsSangeon LEE, Moataz ABDULHAFEZ, Tingting GAO, Xiao LU, Jean Bosco KANA KANA
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Abstract
A system for solder processing a semiconductor device can be performed with LAR (laser assisted reflow) with a low temperature matrix tray. The system includes a tray shield to shield the matrix tray from excessive heat exposure during solder reflow. The shielding prevents heat exposure past the point of warpage during reflow due to heat exposure from laser light. The LAR has a laser source that provides collimated laser light to induce solder reflow in the target semiconductor device.
Claims17
A system for solder processing comprising:
- a matrix tray to hold a semiconductor device for solder processing;
- a laser-assisted reflow (LAR) laser source to provide collimated laser light to heat the semiconductor device;
- and
- a tray shield to shield the matrix tray from heat exposure from the laser light.
A method for solder processing comprising:
- securing a semiconductor device in a matrix tray for solder processing;
- exposing the semiconductor device to collimated laser light with a laser-assisted reflow (LAR) laser source to heat the semiconductor device;
- and
- shielding, with a tray shield, the matrix tray from heat exposure from the laser light.
Dependencies are inferred from the claim text.