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US 2026/0191066 A1Published application
Imprint mold, method for manufacturing semiconductor device using the same, and semiconductor device
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsYUTO TANAKA, KIYOKAZU ITOI, DAISUKE SAKURAI
Life of this patent
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Abstract
Imprint mold 50 includes first surface 51A, second surface 51B that is opposite to first surface 51A and is an uneven surface, and a plurality of pillars 52 protruding from second surface 51B. Second surface 51B around pillar 52 has a recessed shape recessed toward first surface 51A. Imprint mold 50 is used to provide opening 42 in resist 40 provided on a surface of semiconductor element 10, opening 42 corresponding to a position of electrode terminal 11.
Claims10
An imprint mold comprising:
- a first surface;
- a second surface that is opposite to the first surface and is an uneven surface;
- and
- a plurality of pillars protruding from the second surface,
- wherein the second surface includes a plurality of recesses, each of the plurality of recesses is recessed toward the first surface around a corresponding one of the plurality of pillars.
2 more elements
A semiconductor device comprising:
- a semiconductor element having a surface provided with a plurality of electrode terminals;
- and
- a resist provided covering the surface and including a plurality of openings,
- wherein at least one of the plurality of openings overlaps one of the plurality of electrode terminals when viewed from above the surface of the resist and reaches the one of the plurality of electrode terminals,
- the surface of the resist is an uneven surface having a plurality of protrusions each of which surrounds a corresponding one of the plurality of openings, and
- the plurality of openings each include a second part and a first part in a thickness direction of the resist in sectional view, the second part having a wide width along the surface and the first part having a narrower width than the second part.
3 more elements
Dependencies are inferred from the claim text.