Conductive film
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsMomoko Okada, Keishiro Murata, Yoshitaka Sakaue
Life of this patent
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Abstract
A first surface (5a) of a substrate (5) has a groove (9a) and a groove (9b) extending linearly. A thickness (L1) is smaller than a thickness (L2), where the angle (C1) between the bottom (91a) and the side surface (92a) of the groove (9a) is smaller than the angle (C2) between the bottom (91b) and the side surface (92b) of the groove (9b). The thickness (L1) is the thickness of the side surface (312a) of an adhesion layer (31a) extending in the side surface (92a) of the groove (9a). The thickness (L2) is the thickness of the side surface (312b) of an adhesion layer (31b) extending in the side surface (92b) of the groove (9b).
Claims7
A conductive film comprising:
- a substrate with a first surface, the first surface of the substrate including a first groove and a second groove that are bottomed and extend linearly,
- a first conductive layer made of a metal being embedded in the first groove with a first metal compound layer interposed therebetween, the first metal compound layer being made of a metal compound;
- and
- a second conductive layer made of a metal being embedded in the second groove with a second metal compound layer interposed therebetween, the second metal compound layer being made of a metal compound;
- wherein, the first groove including a first bottom, and a first side connecting the first bottom and an opening of the first groove,
- the second groove including a second bottom, and a second side connecting the second bottom and an opening of the second groove,
- the first metal compound layer including a first layer along the first side,
- the second metal compound layer including a second layer along the second side,
- a first thickness of the first layer being smaller than a second thickness of the second layer, where a first angle between the first bottom and the first side is smaller than a second angle between the second bottom and the second side.
Dependencies are inferred from the claim text.