Apparatus and method for forming and releasing substrate stack from carrier
AssigneeMarvell Asia Pte Ltd
InventorsRichard Graf, Luke England, Manish Nayini, Janak G. Patel
Life of this patent
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Abstract
An apparatus for releasing a substrate stack includes: a carrier configured to support the substrate stack; a fixture disposed on the carrier and configured to surround the substrate stack; first pins attached to the fixture and extending perpendicular to a top surface of the fixture; and a torque rod positioned between the first pins and configured to engage the first pins to apply torque on the fixture relative to the carrier to release the substrate stack from the carrier.
Claims22
An apparatus for releasing a substrate stack, the apparatus comprising:
- a carrier configured to support the substrate stack;
- a fixture disposed on the carrier and configured to surround the substrate stack;
- a first plurality of pins attached to the fixture and extending perpendicular to a top surface of the fixture;
- and
- a torque rod positioned between the first plurality of pins and configured to engage the first plurality of pins to apply torque on the fixture relative to the carrier to release the substrate stack from the carrier.
A method for forming and releasing a substrate stack, the method comprising:
- binding a base substrate of the substrate stack to a top surface of a carrier and within an inner periphery of a fixture, wherein the carrier is configured to support the substrate stack, and wherein the fixture is disposed on the carrier, surrounds the substrate stack, and comprises a first plurality of pins attached to the fixture and extending perpendicular to a top surface of the fixture;
- and
- subsequent to binding the base substrate to the top surface of the carrier, applying torque on the fixture relative to the carrier via the first plurality of pins and in turn applying torque on and rotating the substrate stack relative to the carrier to release the substrate stack from the carrier.
Dependencies are inferred from the claim text.