Path Setting System, Path Setting Method, and Software

A path setting system used for setting paths of a plurality of transfer bodies in a substrate transfer device, the substrate transfer device including a substrate transfer area and the plurality of transfer bodies, each having a support configured to support a substrate and configured to float and move by a magnetic force from a floor forming the substrate transfer area, comprising:

• an input receiver configured to receive information for generating a moving path;
• a virtual area setting part configured to set a virtual area corresponding to the substrate transfer area;
• a path generating part configured to generate the moving path of each of the transfer bodies from a movement start position to a movement end position based on the received information;
• a time information acquiring part configured to acquire time information of different positions of the transfer bodies on the moving paths;
• a support information storing part configured to store support information indicating whether or not the substrate is supported by the transfer bodies on the moving paths;
• an interference determining part configured to determine interference between the transfer bodies based on the respective moving paths, the time information, the support information;
• a countermeasure part configured to avoid the interference between the transfer bodies depending on a determination result of the interference determining part;
• a priority storing part configured to store priorities of movement of the transfer bodies;
• a display configured to display the moving path of each of the transfer bodies on the virtual area and display an interference position on the virtual area when the interference is determined to occur,
• wherein the countermeasure part sets or suggests, based on the priorities, any one of the following countermeasures:
• changing the moving paths to avoid an interference occurrence position where the interference between the transfer bodies is expected to occur;
• and
• shifting timings at which the transfer bodies move to the interference occurrence position, and
• when the priorities of the transfer bodies are the same, the countermeasure part changes at least one of the moving paths based on the sum of moving times of the transfer bodies that are expected to interfere with each other from a movement start position to a movement end position.