Cassette hold down with contact arms
AssigneeEntegris, Inc.
InventorsHang Khim Tan, Mohamad Zakaria Abd Mutholib
Life of this patent
Estimating the term…
Abstract
A cassette hold down includes a frame and a plurality of contact arms that extend from the frame. The contact arms include a first contact arm and a second contact arm that extend in different directions from the frame. Each of the contact arms includes a fixed end affixed to the frame, a free end opposite to the fixed end, a cassette contact that extends from the free end in a first vertical direction, and a cassette contact that extends from the free end in a second vertical direction. A wafer container includes a pod, a door configured to close an open end of the pod, a wafer cassette, and a cassette hold down. In the assembled wafer container, a cassette contact of each contact arm of the frame abuts the wafer cassette in the wafer container.
Claims19
A cassette hold down, comprising:
- a frame;
- and
- a plurality of contact arms extending from the frame, the contact arms including a first contact arm and a second contact arm that extend in different directions from the frame, each of the contact arms including:
- a fixed end affixed to the frame,
- a free end opposite to the fixed end,
- a pod contact extending from the free end in a first vertical direction from a first side of the frame, and
- a cassette contact extending from the free end in a second vertical direction from a second side of the frame opposite the first side.
A wafer container, comprising:
- a pod including one or more side walls, a closed end, an internal space defined by the one or more side walls and the closed end, and an open end;
- a door, the door configured to close the open end of the pod;
- a wafer cassette;
- and
- a cassette hold down including a frame and a plurality of contact arms extending from the frame, the contact arms including a first contact arm and a second contact arm that extend in different directions from the frame, each of the contact arms including:
- a fixed end affixed to the frame,
- a free end opposite to the fixed end,
- a pod contact extending from the free end in a first vertical direction from a first side of the frame, and
- a cassette contact extending from the free end in a second vertical direction from a second side of the frame opposite the first side,
- wherein when the wafer cassette and the cassette hold down are located in the internal space and the door is closing the open end, the cassette contact of each of the contact arms abuts the wafer cassette.
Dependencies are inferred from the claim text.