Microwave annealing apparatus and method

A microwave annealing apparatus, comprising:

• a heating chamber defined by a housing and provided with at least one carrier inside the housing to hold at least one integrated electronic component and a plurality of microwave power sources disposed on the housing, wherein the plurality of microwave power sources are electrically and respectively connected to corresponding microwave power supplies and directed toward the heating chamber to provide a microwave heating state for the at least one integrated electronic component to be heated;
• a cooling temperature control module disposed below the housing and configured to provide a temperature state to cool the at least one integrated electronic component on the at least one carrier;
• a gas pipeline module disposed below the heating chamber and configured to introduce a gas through a plurality of air inlet holes in the housing of the heating chamber to provide a gas state;
• an operation interface module configured to set a plurality of process parameters for the microwave annealing apparatus;
• and
• a control module electrically connected to the operation interface module, the microwave power supplies, the cooling temperature control module, and the gas pipeline module and configured to control, after the operation interface module sets the plurality of process parameters, activation and deactivation of the microwave power supplies, the cooling temperature control module, and the gas pipeline module to provide the microwave heating state, the temperature state, and the gas state, wherein:
• the plurality of process parameters include at least one microwave heating parameter associated with the microwave heating state, at least one temperature parameter associated with the temperature state, and at least one gas parameter associated with the gas state;
• the at least one microwave heating parameter includes at least one of an activation and deactivation status of the microwave power sources, a microwave heating power, a microwave heating energy, a microwave power density, a microwave energy density, and a microwave electric field strength;
• the at least one temperature parameter includes at least one of a heating rate, a maintenance temperature, and a maintenance time for a constant temperature;
• and
• the at least one gas parameter includes at least one of a gas type, a gas flow rate, and an oxygen concentration.