Semiconductor manufacturing equipment and semiconductor manufacturing method
AssigneeSemes Co., Ltd.
InventorsJang Jin LEE, Hyun YOON, Yong Jun KIM, Kang Sul KIM, SERYEYOHAN CHO, Ki Hoon CHOI
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Abstract
Disclosed relates to semiconductor manufacturing equipment and a semiconductor manufacturing method and, more particularly to semiconductor manufacturing equipment and a semiconductor manufacturing method, the semiconductor manufacturing equipment including a process station in which a plurality of dry processing units is provided on an upper level and a plurality of wet processing units is provided on a lower level, and a cover surrounds each dry processing unit and each wet processing unit to shield electromagnetic waves of the dry processing unit.
Claims18
Semiconductor manufacturing equipment for processing a substrate, the semiconductor manufacturing equipment comprising:
- a load port configured to load the substrate into a first side of the semiconductor manufacturing equipment;
- an index module extending in a first direction from the load port and configured to transfer the substrate;
- and
- a process station connected to the index module and extending in a second direction, and comprising a plurality of levels,
- wherein the process station comprises a plurality of dry processing units on an upper level and a plurality of wet processing units on a lower level.
Semiconductor manufacturing equipment for processing a substrate, the semiconductor manufacturing equipment comprising:
- a load port configured to load the substrate into a first side of the semiconductor manufacturing equipment;
- an index module extending in a first direction from the load port and configured to transfer the substrate;
- and
- a process station connected to the index module, extending in a second direction, and comprising a plurality of dry processing units and a plurality of wet processing units;
- and
- a plurality of covers configured to shield electromagnetic waves, wherein the plurality of covers surrounds the plurality of dry processing units and the plurality of wet processing units.
Dependencies are inferred from the claim text.