Substrate treatment apparatus and substrate treatment method
AssigneeSemes Co., Ltd.
InventorsChang Suk OH, Eun Woo PARK, Ki Sang EUM
Life of this patent
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Abstract
A substrate treatment apparatus includes a treatment container having a treatment space for a substrate, a support portion provided in the treatment space, and configured to support the substrate, and a rotary nozzle unit provided in the treatment space, the rotary nozzle unit configured to spray a treatment liquid onto a central region of a lower surface of the substrate by rotating about a rotational shaft within a first angular range, and to spray the treatment liquid onto an edge region of the lower surface of the substrate by rotating about the rotational shaft within a second angular range.
Claims18
A substrate treatment apparatus comprising:
- a treatment container having a processing space for a substrate;
- a support portion provided in the processing space, and configured to support the substrate;
- and
- a rotary nozzle unit provided in the processing space, the rotary nozzle unit configured to spray a treatment liquid onto a central region of a lower surface of the substrate by rotating about a rotational shaft within a first angular range, and to spray the treatment liquid onto an edge region of the lower surface of the substrate by rotating about the rotational shaft within a second angular range.
-19. (canceled)
A substrate treatment apparatus comprising:
- a treatment container having a processing space for a substrate;
- a support portion provided in the processing space, and configured to support the substrate;
- and
- a rotary nozzle unit provided in the processing space, and configured to spray a treatment liquid onto a central region of a lower surface of the substrate by rotating about a rotational shaft within a first angular range, and to spray the treatment liquid onto an edge region of the lower surface of the substrate by rotating about the rotational shaft within a second angular range,
- wherein the rotary nozzle unit comprises:
- a housing formed in a cup shape, and having an arcuate curved surface, an internal space and an upper opening;
- a nozzle portion provided in the internal space of the housing, and configured to spray a treatment liquid toward the lower surface of the substrate;
- an intake portion provided in the internal space of the housing, and configured to intake the sprayed treatment liquid;
- a gas injection portion provided along an inner wall of a first curved surface of the housing having the arcuate curved shape, and configured to inject gas to form an air curtain;
- a cover member protruding outwardly from a second curved surface opposing the first curved surface;
- and
- a drive unit configured to rotate the rotary nozzle unit about the rotational shaft and to move the rotary nozzle unit in a vertical direction.
Dependencies are inferred from the claim text.