Circulation duct structure for a semiconductor processing system
AssigneeASM IP Holding B.V.
InventorsTakashi Hagino, Akira Maruyama, Ryosuke Adachi, Joongmin Lee
Life of this patent
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Abstract
A duct assembly for a semiconductor processing system is disclosed in accordance with at least one embodiment of the invention. The duct assembly is coupled to an equipment front end module (EFEM) and is configured to process a nitrogen (N2) gas that passes through the EFEM. The duct assembly is designed such that a chemical filter for processing the N2 gas can be removed without detaching the duct assembly from the EFEM. Benefits from the at least one embodiment of the invention include a reduced maintenance time.
Claims14
A semiconductor processing system, comprising:
- one or more load ports configured to hold wafers;
- an equipment front end module having a wafer transfer robot to transfer wafers between one or more load ports and a load lock chamber;
- a chemical filter configured to filter out a gas flowing through the equipment front end module;
- and
- at least one circulation duct structure coupled to the equipment front end module;
- wherein the at least one circulation duct structure is installed at a location proximate to the one or more load ports;
- and
- wherein the chemical filter is unobstructed by the at least one circulation duct structure.
A duct assembly comprises:
- an equipment front end module (EFEM) having a wafer transfer robot to transfer wafers between one or more load ports and a load lock chamber, wherein the EFEM comprises:
- a filter section configured to hold a chemical filter;
- and
- a mini-environment door;
- an upper duct section coupled to the filter section;
- a vertical duct section coupled to the upper duct section and located proximate to the one or more load ports;
- and
- a lower duct section coupled to the vertical duct section, wherein the lower duct section is located proximate to the mini-environment door,
- wherein the chemical filter can be replaced without separation of the upper duct section from the filter section.
Dependencies are inferred from the claim text.