Circulation apparatus and method of controlling circulation apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorTatsuhiko KAWAGUCHI
Life of this patent
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AssigneeSCREEN Holdings Co., Ltd.
InventorTatsuhiko KAWAGUCHI
Estimating the term…
A circulation apparatus includes: a first pipe which is used for supplying a liquid and into which the liquid flows from a storage tank; a heater disposed in the first pipe which heats the liquid; a pump disposed in the first pipe; a first valve connected in the first pipe to the pump through the heater; a second pipe from which the liquid flows into the storage tank and which is connected to the first pipe between the heater and the first valve; and a third pipe which is used for collecting the liquid and from which the liquid flows into the storage tank. While the heater heats the liquid, the first valve is closed during a first period; the first valve is opened, and a pressure loss value of the second pipe is increased during a second period after the end of the first period.
A circulation apparatus that supplies and collects a liquid to and from an external path, the circulation apparatus comprising:
A method of controlling a circulation apparatus that supplies and collects a liquid to and from an external path,
Dependencies are inferred from the claim text.