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US 2026/0190871 A1Published application
Method of manufacturing josephson junction element and josephson junction element
AssigneeFujitsu Limited
InventorMakoto NAKAMURA
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Abstract
A method of manufacturing a Josephson junction element includes forming a lower electrode on a substrate by using a superconducting material, depositing a first insulating film on the substrate to cover the lower electrode, depositing a superconducting film on the first insulating film, and forming an upper electrode by etching the superconducting film, the upper electrode covering an entire lower electrode in plan view and having an outer peripheral edge located outside an outer peripheral edge of the lower electrode.
Claims16
A method of manufacturing a Josephson junction element comprising:
- forming a lower electrode on a substrate by using a superconducting material;
- depositing a first insulating film on the substrate to cover the lower electrode;
- depositing a superconducting film on the first insulating film;
- and
- forming an upper electrode by etching the superconducting film, the upper electrode covering an entire lower electrode in plan view and having an outer peripheral edge located outside an outer peripheral edge of the lower electrode.
2 more elements
A Josephson junction element comprising:
- a substrate;
- a lower electrode provided on the substrate and formed of a superconducting material;
- a first insulating film provided on the lower electrode in contact with the lower electrode;
- and
- an upper electrode provided on the first insulating film in contact with the first insulating film and formed of a superconducting material in a region overlapping the lower electrode in plan view;
- wherein the upper electrode covers an entire lower electrode in plan view, and an outer peripheral edge of the upper electrode is located outside an outer peripheral edge of the lower electrode, and
- the first insulating film is provided under the upper electrode over an entire upper electrode.
4 more elements
Dependencies are inferred from the claim text.