Self-powered broadband photo-detecting device and method of fabricating the same
AssigneeMing Chi University of Technology
InventorsSheng-Chi CHEN, Kumar MAHESH, Saravanan ADHIMOORTHY, Bohr-Ran HUANG, Hui SUN
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Abstract
The invention discloses a self-powered broadband photo-detecting device and a fabricating method. According to the invention, the self-powered broadband photo-detecting device includes a substrate, a plurality of nanorods, and a plurality of nanoflake clusters. The plurality of nanorods is formed on the upper surface of the substrate. The plurality of nanorods is formed from an oxide of a metal. Each nanoflake cluster is formed on a respective top of one of the plurality of nanorods. The plurality of nanoflake clusters is formed of a chalcogenide of the metal.
Claims8
A self-powered broadband photo-detecting device comprising:
- a substrate having an upper surface;
- a plurality of nanorods formed on the upper surface of the substrate, the plurality of nanorods being formed of an oxide of a designated metal, wherein the designated metal is one selected from the group consisting of tin, alumina, lead, arsenic, plutonium, phosphorus, antimony, boron, aluminum, gallium, plutonium, titanium, and sodium;
- and
- a plurality of nanoflake clusters, each nanoflake cluster being formed on a respective top of one of the plurality of nanorods, the plurality of nanoflake clusters being formed of a chalcogenide of the designated metal.
A method of fabricating a self-powered broadband photo-detecting device, comprising the steps of:
- preparing a substrate having an upper surface;
- by a first hydrothermal process, forming a plurality of nanorods on the upper surface of the substrate, wherein the plurality of nanorods is formed of an oxide of a designated metal, the designated metal is one selected from the group consisting of tin, alumina, lead, arsenic, plutonium, phosphorus, antimony, boron, aluminum, gallium, plutonium, titanium, and sodium;
- and
- by a second hydrothermal process, forming a plurality of nanoflake clusters, each nanoflake cluster being formed on a respective top of one of the plurality of nanorods, wherein the plurality of nanoflake clusters are formed of a chalcogenide of the designated metal.
Dependencies are inferred from the claim text.