Bulk acoustic wave device with temperature compensation layer having positive temperature coefficient of variation

An acoustic wave filter for filtering a radio frequency signal, the acoustic wave filter comprising:

• a bulk acoustic wave device including a first electrode, a second electrode, a piezoelectric layer between the first electrode and the second electrode, and a temperature compensation layer in thermal communication with the piezoelectric layer, the temperature compensation layer including a silicon oxide composite that includes silicon oxide and a stiffening agent, and the temperature compensation layer having a positive temperature coefficient of variation;
• and
• a plurality of additional acoustic wave resonators, the bulk acoustic wave device and the plurality of additional acoustic wave resonators configured to filter the radio frequency signal.