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US 2026/0188607 A1Published application
Focused ion beam device and method of producing a sample piece using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYEOSEON CHOI, JAEGEUM YOON
Life of this patent
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Abstract
A focused ion beam device includes a chamber, a stage in the chamber, an electron beam generator in the chamber and emitting an electron beam toward a sample on the stage, an ion beam generator in the chamber and emitting an ion beam toward the sample on the stage, a detector in the chamber and detecting secondary electrons emitted from the sample, and a first loader and a second loader connected to the chamber.
Claims20
A focused ion beam device comprising:
- a chamber;
- a stage in the chamber;
- an electron beam generator in the chamber and emitting an electron beam toward a sample on the stage;
- an ion beam generator in the chamber and emitting an ion beam toward the sample on the stage;
- a detector in the chamber and detecting secondary electrons emitted from the sample;
- and
- a first loader connected to the chamber and a second loader connected to the chamber.
4 more elements
A focused ion beam device comprising:
- a chamber provided with
- an electron beam generator, an ion beam generator, and a detector;
- a first loader connected to the chamber;
- and
- a second loader connected to the chamber,
- wherein the first loader is configured to load a first holder for fixing a sample, and
- wherein the second loader is configured to load a second holder for fixing a grid.
4 more elements
A method of producing an analysis sample, the method comprising:
- loading a first sample on a first loader of a focused ion beam device;
- loading a first grid on a second loader of the focused ion beam device;
- moving the first sample from the first loader into a chamber of the focused ion beam device;
- performing a sampling process on the first sample to extract a first sample piece from the first sample;
- moving the first grid from the second loader into the chamber;
- fixing the first sample piece to the first grid;
- and
- performing a milling process on the first sample piece.
5 more elements
Dependencies are inferred from the claim text.