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US 2026/0186205 A1Published application
Structures including a waveguide core with a dielectric-filled slotted region
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Structures for a photonic chip that include a waveguide core and methods of forming such structures. The structure comprises a waveguide core including a slot and a dielectric layer inside the slot. The waveguide core comprises a material having a first refractive index, and the dielectric layer comprises a dielectric material having a second refractive index that is less than the first refractive index.
Claims20
A structure for a photonics chip, the structure comprising:
- a first waveguide core including a first slot, the first waveguide core comprising a material having a first refractive index;
- and
- a first dielectric layer inside the first slot, the first dielectric layer comprising a first dielectric material having a second refractive index that is less than the first refractive index.
A method of forming a structure for a photonic chip, the method comprising:
- forming a first waveguide core including a slot, wherein the first waveguide core comprises a material having a first refractive index;
- and
- forming a dielectric layer that includes a portion positioned inside the slot, wherein the dielectric layer comprises a dielectric material having a second refractive index that is less than the first refractive index.
Dependencies are inferred from the claim text.