Semiconductor testing device
AssigneeKabushiki Kaisha Nihon Micronics
InventorsHideki IKEUCHI, Furawa ODAGIRI, Shoujirou YAHATA
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AssigneeKabushiki Kaisha Nihon Micronics
InventorsHideki IKEUCHI, Furawa ODAGIRI, Shoujirou YAHATA
Estimating the term…
A tester includes a performance board unit on which a probe card is mounted, a plurality of board units electrically connected to the probe card via the performance board unit, a plurality of power supply units supplying power to the plurality of board units, and a main body unit, on which the performance board unit is mounted, including a first accommodating portion that accommodates the plurality of board units and a second accommodating portion that accommodates the plurality of power supply units, in which the plurality of power supply units are detachably attached to the second accommodating portion, and the main body unit includes a bus bar electrically connected to the plurality of power supply units in an attachment/detachment direction (Y-axis direction) of the plurality of power supply units with respect to the second accommodating portion.
A semiconductor testing device comprising:
Dependencies are inferred from the claim text.