Probe card and method for inspecting light emitting element

Abstract

A probe card and a method for inspecting a light emitting element are disclosed. In one aspect, the probe card includes a probe substrate, a plurality of piezoelectric elements disposed on one surface of the probe substrate, and a plurality of electrode units disposed on the plurality of piezoelectric elements. Each electrode unit includes a plurality of pin electrodes, and each piezoelectric element of the plurality of piezoelectric elements corresponds one to one with each pin electrode of the plurality of pin electrodes. By applying a voltage to each piezoelectric element, its shape can be deformed to change the Z axis position of the corresponding pin electrode. This allows the probe card to adjust the height of individual pin electrodes for contacting electrodes of light emitting elements on a wafer, enabling accurate electrical inspection even when wafer flatness or electrode positions vary.

Dependencies are inferred from the claim text.