Crystal growth apparatus
AssigneeMetal Industries Research & Development Centre
InventorsJhong Cin HONG, Chang-Sin YE
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AssigneeMetal Industries Research & Development Centre
InventorsJhong Cin HONG, Chang-Sin YE
Estimating the term…
A crystal growth apparatus includes a crucible, an upper cover, a first coil, a second coil, a third coil, a first power supply unit, a second power supply unit and a third power supply unit. The crucible is configured to accommodate a crystal growth material. The upper cover is on the top of the crucible, forms a reaction space with the crucible, in which the upper cover is configured to carry a crystal seed formed by the crystal growth apparatus. The first, second and third coils surround the crucible and are arranged sequentially from top to bottom in a vertical direction. The first power supply unit is electrically coupled to the first coil. The second power supply unit is electrically coupled to the second coil. The third power supply unit is electrically coupled to the third coil.
A crystal growth apparatus, comprising:
Dependencies are inferred from the claim text.