Substrate processing apparatus including ultrasonic nozzle and method for driving the same

A substrate processing apparatus comprising:

• a rotary chuck configured to support a substrate;
• a chemical solution supplier configured to supply chemical solution to the substrate;
• a sonic oscillator including an ultrasonic nozzle that vibrates by a vibrator's vibration;
• a home port provided on one side of the rotary chuck and configured to accommodate the ultrasonic nozzle in a standby state;
• and
• a controller configured to control the rotary chuck, the chemical solution supplier, the sonic oscillator, and the home port,
• wherein
• the home port includes:
• a bath with an opening at the top;
• and a cleaning solution supplier configured to supply cleaning solution to the bath,
• the cleaning solution supplier continuously supplies cleaning solution into the bath, causing the cleaning solution to overflow,
• during a cleaning period, the ultrasonic nozzle vibrates at a first output to vibrate the chemical solution applied on the substrate,
• during a standby period, the ultrasonic nozzle is submerged in the cleaning solution through the opening of the home port,
• the standby period includes consecutive first, second, and third periods,
• during the first period, the ultrasonic nozzle vibrates at a second output greater than the first output, thereby detaching particles from the ultrasonic nozzle,
• during the second period, the ultrasonic nozzle stops vibrating and the detached particles overflow out of the bath with the cleaning solution, and
• during the third period, the ultrasonic nozzle vibrates again.

A method for driving a substrate processing apparatus, the method comprising:

• placing a substrate on a support member;
• supplying chemical solution onto the substrate;
• cleaning the substrate by vibrating the chemical solution applied on the substrate using an ultrasonic nozzle;
• moving the ultrasonic nozzle to a home port;
• and
• removing particles adhering to the ultrasonic nozzle by vibrating the ultrasonic nozzle in the home port.