An abatement system for treatment of exhaust gases of a vacuum processing system
AssigneeEdwards Limited
InventorsJulian Richard Dean, Rohit Dilip Pitale
Life of this patent
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Abstract
An abatement system (104) for treatment of exhaust gases of a vacuum processing system (100), the abatement system (104) comprising: an inlet manifold (200), the inlet manifold (200) comprising: a single fluid inlet (224) for receiving an exhaust gas stream from the vacuum processing system (102); and a plurality of fluid outlets (226) coupled to the fluid inlet (224); and a plurality of abatement devices (202) arranged to, in use, receive the exhaust gas stream from the inlet manifold (200); wherein each abatement device (202) of the plurality of abatement devices (202) is coupled to a respective fluid outlet (226) of the inlet manifold (200).
Claims15
An abatement system for treatment of exhaust gases of a vacuum processing system, the abatement system comprising:
- an inlet manifold, the inlet manifold comprising:
- a fluid inlet for receiving an exhaust gas stream from the vacuum processing system;
- and
- a plurality of fluid outlets coupled to the fluid inlet;
- and
- a plurality of abatement devices arranged to receive the exhaust gas stream from the inlet manifold;
- wherein
- each abatement device of the plurality of abatement devices is coupled to a respective fluid outlet of the inlet manifold;
- and
- each abatement device of the plurality of abatement devices comprises a plasma abatement device for generating a plasma to decompose a component of the exhaust gas stream.
A method for treating exhaust gases of a vacuum processing system, the method comprising:
- receiving, at a fluid inlet of an inlet manifold, an exhaust gas stream from the vacuum processing system;
- outputting, at each of a plurality of fluid outlets of the inlet manifold, a respective portion of the exhaust gas stream;
- receiving, at each of a plurality of abatement devices, from a respective fluid outlet of the inlet manifold, a respective portion of the exhaust gas stream;
- and
- treating, by each of the plurality of abatement devices, said received respective portion of the exhaust gas stream,
- wherein each abatement device of the plurality of abatement devices comprises a plasma abatement device and the treating comprises generating a plasma to decompose a component of the exhaust gas stream.
Dependencies are inferred from the claim text.