Apparatus including tsv and multiple insulating materials

An apparatus, comprising:

• a plurality of wirings in a metal layer;
• a through-silicon via (TSV) coupled to at least one first wiring of the plurality of wirings;
• and
• an insulating layer under the metal layer as a barrier layer for the TSV, the insulating layer comprising:
• a first portion including a first insulating material, provided in a first region where the TSV is provided and configured to cover at least top part of the TSV;
• a second portion including a second insulating material different from the first insulating material, provided in a second region where the TSV is not provided, the second region is a region where one or more second wirings of the plurality of wirings are located;
• and
• a third portion including a third insulating material same as the first insulating material, provided in a third region where one or more third wirings of the plurality of wirings are located, wherein
• the one or more second wirings in the second region are for supplying a higher voltage than the one or more third wirings in the third region.

An apparatus, comprising:

• a plurality of wirings in a metal layer;
• a through-silicon via (TSV) coupled to at least one first wiring of the plurality of wirings;
• and
• an insulating layer under the metal layer as a barrier layer for the TSV, the insulating layer comprising:
• a first portion including a first insulating material, provided in a first region where the TSV is provided and configured to cover at least top part of the TSV;
• a second portion including a second insulating material different from the first insulating material, provided in a second region where the TSV is not provided, the second region is a region where one or more second wirings of the plurality of wirings are located;
• and
• a third portion including a third insulating material same as the second insulating material, provided in a third region where one or more third wirings of the plurality of wirings are located, wherein
• the one or more second wirings in the second region are for supplying a higher voltage than the one or more third wirings in the third region.